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  • P51piezo Tilt Stage Z Tip Piezo Nanopositioning Stages - China

    price: contact company for price

    P51 series nanopositioning Z-stages and Z-tip/tilt stages are designed for alignment, nano-focusing or metrology tasks, etc.

    They feature a very low profile of 26.5mm, a large 100mm×100mm aperture, and offer highly accurate motion with sub-nanometer resolution.

    Technical Data:

    • Types: P51 - T1S, T51 - T1K

    • Active axes: Z, θx, θy

    • Integrated sensor: SGS

    • Z direction travel range(0~+120V): 80(1mrad)um±20%

    • Z direction max.

    travel range(-20~+150V): 110um±2 0%

    • θx, θy travel range(0~+120V): 1mrad

    • θx, θy max travel range(-20~+150V): 1mrad

    • Resolution: 0.7 (0.1urad), 0.25 (0.05urad)nm

    • Linearity, closed-loop: 0.25%F.S.

    • Repeatability: 0.1%F.S.


    • Push/pull force capacity: 24/8 N

    • Max.

    load: 20 N

    • Electrical capacitance: 1.8uF/axis ±20%

    • Unloaded response frequency: 400Hz±20%

    • Response frequency @ 200g: 250Hz±20%

    • Operating temperature range: -20~80 ℃

    • Material: Al

    • Mass: 820g±5%

    Cable length: 1.5m ±10mm


    Company Contact:


    • Phone: 0451-86268790

    • Address: 1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin,China, Harbin , China , China

    • Email: Email


    Published date: February 18, 2021

    • Business Description: CoreMorrow Ltd. focuses on research,development, production and sales of nanoscale precision positioning products, mainly in the service of high-end precision equipment manufacturers.

      After nearly 20 years of rapid development, our market has covered all well-known colleges and universities, research institutes, and high precision equipment manufacturers, and exported to Europe, America, Canada, Singapore, Japan, Korea and other countries.

      We have established partnerships with a number of high-tech enterprises, state key laboratory, has become Chinese most professional precision positioning products manufacturer.

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