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Magnetron Source Planar Dual High Yield Type - China
price: 20000.00 Dollar US$
Planar magnetron source
DST- PMEH100500-AS-AU Specifications
Exterior Dimension: 640mmx290mm
Target Material Size: 100x500x6mm
Electrode: M8 studs
Gas Distribution and Connectors: single section distribution, 1/4 inch male coupling connector x2pcs
Gas distribution adjustable Water Cooling: Cathode: 16x12PU tube, quick release coupling(screw), 2x in, 2x out;
Anode: 12 x 8 PU tube, quick release coupling(screw), 2x in, 2x out;
Back plate: 12 x 8 PU tube, quick release coupling(screw) 1x in, 1x out; Installation Requirements
Cooling water Temp: 18-22°C
Cooling water Pressure: < 3KG/cm2
Cooling water Flow Rate: >1.5L/min/KW Water Velocity: faster than 10L/min Features and Benefits:
Sputtering Width: 260mm (target material length minus 300~350mm);
TTS: 80-100mm;
Patented Design (Optional): help reduce substrate temperature;
Gas Distribution: Gas pipe included, distribution adjustable; Magnet Strength and Uniformity: different strength for options, and uniformity adjustable;
Different magnet material for options; Other Models: Inner mount and Exterior mount installation method: DST-PMI100xxxx, DST-PMI125xxxx, DST-PME100xxxx, DST-PME125xxxx; i.e. : DST-PMI100500, DST-PMI125750; DST-PME1001650; DST-PME1251250, DST-PME100750-RF;
High Magnetic Strength: i.e. : DST-PMIH100900, DST-PMEH100500; High Yield: i.
e: DST-PMEY100500-RF, DST-PMEY1251100-DUAL(twin planar cathode);
Company Contact:
- Posted By: Dongguan Dingshen Tech Co., Ltd.
- Phone: +8613717128825
- Address: No.2 Xingcheng R.d. Wusha Community, Chang'an, Dongguan, China, Texas , China
- Email:
Published date: September 12, 2023
- Business Description: We are "The PVD vacuum Industry's Most Trusted Partner for thin film deposition components"in China.
Currently I representing DST for overseas sales partner development.
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