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Plasma Enhanced Chemical Vapor Deposition Coating Machine - China

price: contact company for price

Plasma Enhanced Chemical Vapor Deposition Coating Machine

Products Photos Catalog Plasma Enhanced Photos Catalog

CY-PECVD-450 chemical vapor deposition adopts plasma enhanced chemical vapor deposition technology, which can use high-energy plasma to promote the reaction process, effectively increase the reaction speed and reduce the reaction temperature.

It is suitable for depositing thin films of silicon nitride, amorphous silicon and microcrystalline silicon on different substrates such as optical glass, silicon, quartz and stainless steel.

It has good film-forming quality, less pinholes and is not easy to crack.

It is suitable for the preparation of amorphous silicon and microcrystalline silicon thin film solar cell devices.

It can be widely used in the scientific research and small batch preparation of thin film materials in Colleges and universities and scientific research institutes.

Technical parameter Type CY-PECVD-450

Vacuum chamber front opening door, φ300mm X 300mm, stainless steel

viewing window：φ100mm with baffle

Vacuum pump set Backing pump: rotary vane pump pumping speed is 1.1L/s

Secondary pump: Turbo molecular pump pumping speed 600L/s

Limiting vacuum 10-6Pa

10-4Pa(Within 30 minutes)

Vacuum(deposition) 0.133~133Pa, adjusted according to the process

RF power 13.56MHz, 500W (automatch)

Flow control mass flowmeter(default Ar, 0~200sccm)

Dimensions 1100mm x 800mm x1100mm


Company Contact:


  • Phone: +86 371 5519 9322

  • Address: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China, zhengzhou , henan , China

  • Email: Email


Published date: July 31, 2020

  • Business Description: Founded in 2013 by a group of professional engineers.

    CY is a high and new technology enterprise registered in Zhengzhou,Henan province.

    CY Scientific Instrument mainly provide regular furnace for lab.

    Also do customized furnace and some other related accessories and equpments in high quality and low cost precision machines for material research and R&D lab.

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